Excimer gas-discharge tunable ArF laser

Tunable ArF excimer-laser source.

A tunable ArF* (193-nm) excimer source is described that produces over 125 mJ/pulse (peak) at 10 pulses/sec. This device has a spectral width of less than 2 cm(-1) and a demonstrated tunability of nearly 320 cm(-1) from 192.8 to 193.9 nm. Tunability, bandwidth, and mode control are achieved by injecting the fourth anti-Stokes line (in H(2)) of a frequency-doubled dye laser into an ArF* excimer-...

Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures

Spatial and temporal gain profiles as well as the peak net gain at 193 nm have been measured in X-ray preionized discharges excited by a single pulse electrical system working in the charge transfer mode. Arand F2-containing laser gas mixtures with He or Ne as a buffer gas have been used. With a pumping pulse duration of ∼ 100 ns (FWHM) and a specific peak power deposition of ∼ 1 MW cm−3 bar−1 ...

State-selective detection of CO using a tunable ArF excimer laser

Femtosecond gain characteristics of the discharge-pumped ArF excimer amplifier.

The gain characteristics of a discharge-pumped ArF excimer amplifier are measured with ~700-fs-long pulses. The small-signal gain and saturation energy are found to be 0.17 cm(-1) and 3.65 +/- 0.15 mJ/cm(2), respectively. The maximum output energy density extracted from the deeply saturated amplifier is as much as 10 mJ/cm(2). The demonstrated femtosecond gain characteristics of ArF indicate th...

A Long Pulse Discharge Excited ArF Laser

An X-ray preionised, discharge excited ArF excimer laser, = 193 nm, has been studied in the long pulse regime. The laser performance is found to be primarily dependent on the discharge stability, and therefore, on the gas composition, preionization timing and the pumping power. Using X-ray preionization and prepulse-mainpulse excitation, laser pulselengths of up to 120-ns full-width at half-max...